Online Scheduler [Read-only Mode]

Clean Room Schedule
02/20/2012 - 02/26/2012

View schedule:

January 2012
S	M	T	W	T	F	S
1	2	3	4	5	6	7
8	9	10	11	12	13	14
15	16	17	18	19	20	21
22	23	24	25	26	27	28
29	30	31

February 2012
S	M	T	W	T	F	S
			1	2	3	4
5	6	7	8	9	10	11
12	13	14	15	16	17	18
19	20	21	22	23	24	25
26	27	28	29

March 2012
S	M	T	W	T	F	S
				1	2	3
4	5	6	7	8	9	10
11	12	13	14	15	16	17
18	19	20	21	22	23	24
25	26	27	28	29	30	31

Monday,
02/20/2012

12:00am

1:00am

2:00am

3:00am

4:00am

5:00am

6:00am

7:00am

8:00am

9:00am

10:00am

11:00am

12:00pm

1:00pm

2:00pm

3:00pm

4:00pm

5:00pm

6:00pm

7:00pm

8:00pm

9:00pm

10:00pm

11:00pm

01a-Wetbench 1-Organics

01b-Wetbench 2-Acids

01c-Wetbench 3-Developers

02-Raith EBL Writer

03-uPG 101 Laser Writer

04a-Mask Aligner 1-OAI

04b-Mask Aligner 2-Kasper

06-Cluster Resist Spinner Tool

07a-PVD 1-Bestec Metal Deposition System

07b-PVD 2-Kurt J Lesker Thermal Evaporator

07c-PVD 3-Kurt J Lesker PVD75

08-Rapid Thermal Anneal System

09a-RIE 1-Chlorine

09b-RIE 2-Fluorine

10-Tube Furnace

11-PECVD

12-Probe Station

Tuesday,
02/21/2012

12:00am

1:00am

2:00am

3:00am

4:00am

5:00am

6:00am

7:00am

8:00am

9:00am

10:00am

11:00am

12:00pm

1:00pm

2:00pm

3:00pm

4:00pm

5:00pm

6:00pm

7:00pm

8:00pm

9:00pm

10:00pm

11:00pm

01a-Wetbench 1-Organics

01b-Wetbench 2-Acids

01c-Wetbench 3-Developers

02-Raith EBL Writer

03-uPG 101 Laser Writer

04a-Mask Aligner 1-OAI

04b-Mask Aligner 2-Kasper

06-Cluster Resist Spinner Tool

07a-PVD 1-Bestec Metal Deposition System

07b-PVD 2-Kurt J Lesker Thermal Evaporator

07c-PVD 3-Kurt J Lesker PVD75

08-Rapid Thermal Anneal System

09a-RIE 1-Chlorine

09b-RIE 2-Fluorine

10-Tube Furnace

11-PECVD

12-Probe Station

Wednesday,
02/22/2012

12:00am

1:00am

2:00am

3:00am

4:00am

5:00am

6:00am

7:00am

8:00am

9:00am

10:00am

11:00am

12:00pm

1:00pm

2:00pm

3:00pm

4:00pm

5:00pm

6:00pm

7:00pm

8:00pm

9:00pm

10:00pm

11:00pm

01a-Wetbench 1-Organics

01b-Wetbench 2-Acids

01c-Wetbench 3-Developers

02-Raith EBL Writer

03-uPG 101 Laser Writer

04a-Mask Aligner 1-OAI

04b-Mask Aligner 2-Kasper

06-Cluster Resist Spinner Tool

07a-PVD 1-Bestec Metal Deposition System

07b-PVD 2-Kurt J Lesker Thermal Evaporator

07c-PVD 3-Kurt J Lesker PVD75

08-Rapid Thermal Anneal System

09a-RIE 1-Chlorine

09b-RIE 2-Fluorine

10-Tube Furnace

11-PECVD

12-Probe Station

Thursday,
02/23/2012

12:00am

1:00am

2:00am

3:00am

4:00am

5:00am

6:00am

7:00am

8:00am

9:00am

10:00am

11:00am

12:00pm

1:00pm

2:00pm

3:00pm

4:00pm

5:00pm

6:00pm

7:00pm

8:00pm

9:00pm

10:00pm

11:00pm

01a-Wetbench 1-Organics

01b-Wetbench 2-Acids

01c-Wetbench 3-Developers

02-Raith EBL Writer

03-uPG 101 Laser Writer

04a-Mask Aligner 1-OAI

04b-Mask Aligner 2-Kasper

06-Cluster Resist Spinner Tool

07a-PVD 1-Bestec Metal Deposition System

07b-PVD 2-Kurt J Lesker Thermal Evaporator

07c-PVD 3-Kurt J Lesker PVD75

08-Rapid Thermal Anneal System

09a-RIE 1-Chlorine

09b-RIE 2-Fluorine

10-Tube Furnace

11-PECVD

12-Probe Station

Friday,
02/24/2012

12:00am

1:00am

2:00am

3:00am

4:00am

5:00am

6:00am

7:00am

8:00am

9:00am

10:00am

11:00am

12:00pm

1:00pm

2:00pm

3:00pm

4:00pm

5:00pm

6:00pm

7:00pm

8:00pm

9:00pm

10:00pm

11:00pm

01a-Wetbench 1-Organics

01b-Wetbench 2-Acids

01c-Wetbench 3-Developers

02-Raith EBL Writer

03-uPG 101 Laser Writer

04a-Mask Aligner 1-OAI

04b-Mask Aligner 2-Kasper

06-Cluster Resist Spinner Tool

07a-PVD 1-Bestec Metal Deposition System

07b-PVD 2-Kurt J Lesker Thermal Evaporator

07c-PVD 3-Kurt J Lesker PVD75

08-Rapid Thermal Anneal System

09a-RIE 1-Chlorine

09b-RIE 2-Fluorine

10-Tube Furnace

11-PECVD

12-Probe Station

Saturday,
02/25/2012

12:00am

1:00am

2:00am

3:00am

4:00am

5:00am

6:00am

7:00am

8:00am

9:00am

10:00am

11:00am

12:00pm

1:00pm

2:00pm

3:00pm

4:00pm

5:00pm

6:00pm

7:00pm

8:00pm

9:00pm

10:00pm

11:00pm

01a-Wetbench 1-Organics

01b-Wetbench 2-Acids

01c-Wetbench 3-Developers

02-Raith EBL Writer

03-uPG 101 Laser Writer

04a-Mask Aligner 1-OAI

04b-Mask Aligner 2-Kasper

06-Cluster Resist Spinner Tool

07a-PVD 1-Bestec Metal Deposition System

07b-PVD 2-Kurt J Lesker Thermal Evaporator

07c-PVD 3-Kurt J Lesker PVD75

08-Rapid Thermal Anneal System

09a-RIE 1-Chlorine

09b-RIE 2-Fluorine

10-Tube Furnace

11-PECVD

12-Probe Station

Sunday,
02/26/2012

12:00am

1:00am

2:00am

3:00am

4:00am

5:00am

6:00am

7:00am

8:00am

9:00am

10:00am

11:00am

12:00pm

1:00pm

2:00pm

3:00pm

4:00pm

5:00pm

6:00pm

7:00pm

8:00pm

9:00pm

10:00pm

11:00pm

01a-Wetbench 1-Organics

01b-Wetbench 2-Acids

01c-Wetbench 3-Developers

02-Raith EBL Writer

03-uPG 101 Laser Writer

04a-Mask Aligner 1-OAI

04b-Mask Aligner 2-Kasper

06-Cluster Resist Spinner Tool

07a-PVD 1-Bestec Metal Deposition System

07b-PVD 2-Kurt J Lesker Thermal Evaporator

07c-PVD 3-Kurt J Lesker PVD75

08-Rapid Thermal Anneal System

09a-RIE 1-Chlorine

09b-RIE 2-Fluorine

10-Tube Furnace

11-PECVD

12-Probe Station

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Clean Room Schedule02/20/2012 - 02/26/2012

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Clean Room Schedule
02/20/2012 - 02/26/2012